TY  - CONF
AU  - Chien, F
AU  - Dagata, John
AU  - Hsieh, W
AU  - Gwo, S
C2  - Proceedings of 5th Conference of Nanoengineering and Microsystem Technology, Industrial Technology Research Institute, Hsinchu, 1, TW
DA  - 2001-11-01 00:11:00
LA  - en
PB  - Proceedings of 5th Conference of Nanoengineering and Microsystem Technology, Industrial Technology Research Institute, Hsinchu, 1, TW
PY  - 2001
TI  - Nanomachining of Si with Si3N4 Masks Patterned by Scanning
ER  -