TY  - JOUR
AU  - Pan, Q
AU  - Gonzalez, G
AU  - Composto, R
AU  - Wallace, William
AU  - Arkles, B
AU  - Figge, L
AU  - Berry, D
C2  - Thin Solid Films
DA  - 1999-01-01 00:01:00
LA  - en
M1  - 345
PB  - Thin Solid Films
PY  - 1999
TI  - Spin-on-Glass Thin Films Prepared From a Novel Polysilsesquioxane by Thermal and Ultraviolet-Irradiation Methods
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851493
ER  -