TY - JOUR AU - Yang, S AU - Lee, V. AU - Sun, J AU - Gidley, D AU - Mirau, P AU - Pai, C AU - Nalamasu, O AU - Reichmanis, E AU - Pai, J AU - Obeng, Yaw AU - Seputro, J AU - Lin, Eric C2 - Chemistry of Materials DA - 2002-01-01 00:01:00 LA - en M1 - 14(1) PB - Chemistry of Materials PY - 2002 TI - Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853817 ER -