TY  - JOUR
AU  - Wang, M
AU  - Prabhu, Vivek
AU  - Lin, Eric
AU  - Fasolka, Michael
AU  - Karim, Alamgir
C2  - Polymeric Materials: Science & Engineering
DA  - 2003-03-01 00:03:00
LA  - en
M1  - 90
PB  - Polymeric Materials: Science & Engineering
PY  - 2003
TI  - Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852278
ER  -