TY  - JOUR
AU  - Lee, V.
AU  - Lin, Eric
AU  - Bauer, Barry
AU  - Wu, Wen-Li
AU  - Hwang, B
AU  - Gray, W
C2  - Applied Physics Letters
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 82
PB  - Applied Physics Letters
PY  - 2003
TI  - Characterization of Chemical-Vapor-Deposited Low-K Thin Films Using X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852082
ER  -