TY  - JOUR
AU  - Lee, V.
AU  - Soles, Christopher
AU  - Liu, D
AU  - Bauer, Barry
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Grill, A
C2  - Journal of Applied Physics
DA  - 2004-03-01 00:03:00
LA  - en
M1  - 95
PB  - Journal of Applied Physics
PY  - 2004
TI  - Structural Characterization of Porous Low-K Thin Films Prepared by Different Processing Techniques Using X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852200
ER  -