TY  - JOUR
AU  - Sundaresan, Siddarth
AU  - Rao, M
AU  - Tian, Yong-lai
AU  - Schreifels, John
AU  - Wood, M.
AU  - Jones, K
AU  - Davydov, Albert
C2  - Journal of Electronic Materials
DA  - 2021-10-12 15:10:23
LA  - en
PB  - Journal of Electronic Materials
PY  - 2021
TI  - Comparison of Solid-State Microwave Annealing With Conventional Furnace Annealing of Ion-Implanted SiC
ER  -