TY  - JOUR
AU  - Kreider, K
AU  - DeWitt, D
AU  - Fowler, J
AU  - Proctor, James
AU  - Kimes, W
AU  - Ripple, D
AU  - Tsai, Benjamin
C2  - SPIE
DA  - 2004-01-01 00:01:00
LA  - en
M1  - 5378
PB  - SPIE
PY  - 2004
TI  - Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control
ER  -