TY  - JOUR
AU  - Paul, Rick
AU  - Simons, David
AU  - Guthrie, William
AU  - Lu, John
C2  - Analytical Chemistry
DA  - 2003-07-11
LA  - en
M1  - 75
PB  - Analytical Chemistry
PY  - 2003
TI  - Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon
ER  -