TY  - JOUR
AU  - Materer, N
AU  - Goodman, R
AU  - Leone, S
C2  - Journal of Applied Physics
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 83
PB  - Journal of Applied Physics
PY  - 1998
TI  - Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N<sub>2</sub>: Neutral kinetic energies and source gas cracking
ER  -