TY  - JOUR
AU  - Hill, S
AU  - Haich, C
AU  - Dunning, F
AU  - Walters, G
AU  - McClelland, Jabez
AU  - Celotta, Robert
AU  - Craighead, H
C2  - Applied Physics Letters
DA  - 1999-04-12 00:04:00
LA  - en
M1  - 74
PB  - Applied Physics Letters
PY  - 1999
TI  - Patterning of Hydrogen-Passivated Si(100) using Ar(<sup>3</sup>P<sub>0,2</sub>) Metastable Atoms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620510
ER  -