TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - McDonald, Robert
AU  - Chabli, Amal
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2011-12-28 00:12:00
LA  - en
M1  - 1395
PB  - American Institute of Physics, Melville, NY
PY  - 2011
TI  - Frontiers of Characterization and Metrology for Nanoelectronics: 2011
ER  -