TY  - JOUR
AU  - Znati, sami
AU  - Chedid, N
AU  - Miao, Houxun
AU  - Chen, Lei
AU  - Wen, Han
AU  - Bennett, Eric
C2  - Journal of Surface Engineered Materials and Advanced Technology
DA  - 2015-10-01 00:10:00
DO  - https://doi.org/10.4236/jsemat.2015.54022
LA  - en
M1  - 05
PB  - Journal of Surface Engineered Materials and Advanced Technology
PY  - 2015
TI  - Electrodeposition of gold to conformally fill high-aspect-ratio nanometric silicon grating trenches: a comparison of pulsed and direct current protocols
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918284
ER  -