TY  - JOUR
AU  - Kriese, Michael
AU  - Rodriguez, Jim
AU  - Fournier, Gary
AU  - Grantham, Steven
AU  - Hill, Shannon
AU  - Curry, John
AU  - Tarrio, Charles
AU  - Platonov, Yuriy
C2  - Proceedings of SPIE
DA  - 2015-03-16 00:03:00
DO  - https://doi.org/10.1117/12.2085934
LA  - en
M1  - 9422
PB  - Proceedings of SPIE
PY  - 2015
TI  - Development and evaluation of interface-stabilized and reactive-sputtered oxide-capped multilayers for EUV lithography
ER  -