TY  - CONF
AU  - Copeland, Craig
AU  - McGray, Craig
AU  - Geist, Jon
AU  - Liddle, James
AU  - Ilic, Robert
AU  - Stavis, Samuel
C2  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
DA  - 2017-09-28 00:09:00
DO  - https://doi.org/10.1109/OMN.2017.8051448
LA  - en
PB  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
PY  - 2017
TI  - Aperture Arrays for Subnanometer Calibration of Optical Microscopes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923834
ER  -