TY  - CONF
AU  - Suehle, John
AU  - Zhu, Baozhong
AU  - Chen, Yuan
AU  - Berstein, Joseph
C2  - 2004 IEEE International Reliability Physics Symposium Proceedings, Phoenix, AZ, USA
DA  - 2004-04-29 00:04:00
LA  - en
PB  - 2004 IEEE International Reliability Physics Symposium Proceedings, Phoenix, AZ, USA
PY  - 2004
TI  - Acceleration Factors and Mechanistic Study of Progressive Breakdown in Small Area Ultra-thin Gate Oxides
ER  -