TY  - CONF
AU  - Moyne, James
AU  - Li-Baboud, Ya-Shian
AU  - Zhu, Xiao
AU  - Anand, Dhananjay
AU  - Hussain, Sulaiman
C2  - ISPCS 2008   International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US
DA  - 2008-09-22 00:09:00
LA  - en
PB  - ISPCS 2008   International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US
PY  - 2008
TI  - Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33160
ER  -