TY  - CONF
AU  - Shulver, Byron
AU  - Bunting, Andrew
AU  - Gundlach, Alan
AU  - Haworth, Les
AU  - Ross, Alan
AU  - Snell, Anthony
AU  - Stevenson, J.
AU  - Walton, Anthony
AU  - Allen, Richard
AU  - Cresswell, Michael
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Austin, TX, USA
DA  - 2006-04-01 00:04:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Austin, TX, USA
PY  - 2006
TI  - Design and Fabrication of a Copper Test Structure as a Electrical Critical Dimension Reference
ER  -