TY  - CONF
AU  - Sahiner, M
AU  - Novak, S
AU  - Woicik, Joseph
AU  - Takamura, Y.
AU  - Griffin, P
AU  - Plummer, J
C2  - Si Front-End Junction Formation Technologies, Symposium C | | Silicon Front-End Junction Formation Technologies | Materials Research Society, Undefined
DA  - 2003-01-01 00:01:00
LA  - en
M1  - 717
PB  - Si Front-End Junction Formation Technologies, Symposium C | | Silicon Front-End Junction Formation Technologies | Materials Research Society, Undefined
PY  - 2003
TI  - The Local Structure of Antimony in High Dose Antimony Implants in Silicon by XAFS and SIMS
ER  -