TY  - VIDEO
AU  - Allgair, J
AU  - Archie, C
AU  - Banke, W
AU  - Bogardus, H
AU  - Delaporte, A
AU  - Postek, Michael
AU  - Schlesinger, J
AU  - Singh, B
AU  - Vladar, Andras
AU  - Yanof, A
C2  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version) (SEMATECH Technical Transfer Document)
DA  - 2000-01-31 00:01:00
LA  - en
PB  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version) (SEMATECH Technical Transfer Document)
PY  - 2000
TI  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version)
ER  -