TY  - CONF
AU  - Jones, Ronald
AU  - Soles, Christopher
AU  - Starr, Francis
AU  - Lin, Eric
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopolous, M
C2  - Advances in Resist Technology and Processing, Conference | 19th | | SPIE, Santa Clara, CA
DA  - 2002-12-01 00:12:00
LA  - en
M1  - 4690
PB  - Advances in Resist Technology and Processing, Conference | 19th | | SPIE, Santa Clara, CA
PY  - 2002
TI  - Chain Conformation in Ultrathin Polymer Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852065
ER  -