TY - JOUR AU - Sharpe, W AU - Jadaan, O AU - Beheim, G AU - Quinn, George AU - Nemeth, N C2 - Journal of Micromechanics and Microengineering DA - 2005-10-01 00:10:00 LA - en M1 - 14 PB - Journal of Micromechanics and Microengineering PY - 2005 TI - Fracture Strength of Silicon Carbide Microspecimens ER -