TY  - JOUR
AU  - Lee, V.
AU  - Chao, C
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Fanconi, B
AU  - Lan, J
AU  - Cheng, Y
AU  - Liou, H
AU  - Wang, Y
AU  - Feng, M
C2  - Journal of the Electrochemical Society
DA  - 2001-10-01 00:10:00
LA  - en
M1  - 148
PB  - Journal of the Electrochemical Society
PY  - 2001
TI  - X-Ray Reflectivity and FTIR Measurements of N2 Plasma Effects on the Density Profile of Hydrogen Silsesquioxane Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851795
ER  -