TY  - JOUR
AU  - Kim, J
AU  - Yeo, J
AU  - Paik, U
AU  - Jung, Y
AU  - Park, Jinkyoo
AU  - Hackley, Vincent
C2  - Journal of the Korean Physical Society
DA  - 2001-12-01 00:12:00
LA  - en
M1  - 39
PB  - Journal of the Korean Physical Society
PY  - 2001
TI  - Modification of Electrokinetic Behavior of CeO<sub>2</sub> Abrasive Particles in Chemical Mechanical Polishing for Shallow Trench Isolation
ER  -