TY  - JOUR
AU  - Lee, V.
AU  - Lin, Eric
AU  - Wang, Haonan
AU  - Wu, Wen-Li
AU  - Chen, W
AU  - Deis, T
AU  - Moyer, E
C2  - Chemistry of Materials
DA  - 2002-04-01 00:04:00
LA  - en
M1  - 14
PB  - Chemistry of Materials
PY  - 2002
TI  - Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-k Thin Films Prepared With Varying Process Conditions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851949
ER  -