TY  - JOUR
AU  - Kondoh, E
AU  - Baklanov, M
AU  - Lin, Eric
AU  - Gidley, D
AU  - Nakashima, A
C2  - Japanese Journal of Applied Physics
DA  - 2001-01-01 00:01:00
LA  - en
M1  -  40
PB  - Japanese Journal of Applied Physics
PY  - 2001
TI  - Comparative Study of Pore Size of Low-Dielectric-Contant Porous Spin-on-Glass Films with Different Ways of Non-destructive Instrumentation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853771
ER  -