TY  - JOUR
AU  - Jablonski, E
AU  - Prabhu, Vivek
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Fischer, Daniel
AU  - Goldfarb, D
AU  - Angelopoulos, M
AU  - Ito, H
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-12-01 00:12:00
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Near-Edge X-Ray Absorption Fine Structure Measurements of Surface Segregation in 157 nm Photoresist Blends
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852205
ER  -