TY  - CONF
AU  - Bowen, D
AU  - Deslattes, R
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, Undefined
DA  - 2001-06-01 00:06:00
LA  - en
M1  - No. 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, Undefined
PY  - 2001
TI  - X-Ray Metrology by Diffraction and Reflectivity
ER  -