TY  - CONF
AU  - Kreider, Kenneth
AU  - DeWitt, D
AU  - Fowler, J
AU  - Proctor, J
AU  - Kimes, William
AU  - Ripple, Dean
AU  - Tsai, Benjamin
C2  - Data Analysis and Modeling for Process Control, Technical Conference | | Data Analysis and Modeling for Process Control | SPIE
DA  - 2004-04-01
LA  - en
M1  - 5378
PB  - Data Analysis and Modeling for Process Control, Technical Conference | | Data Analysis and Modeling for Process Control | SPIE
PY  - 2004
TI  - Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830864
ER  -