TY  - CONF
AU  - Bergmann, Detleff
AU  - Bodermann, Bernd
AU  - Bosse, Harald
AU  - Buhr, Egbert
AU  - Dai, Gaoliang
AU  - Dixson, Ronald
AU  - H?er-Grohne, W
C2  - SPIE Proceedings: Scanning Microscopies 2015, Monterey, CA, US
DA  - 2015-11-02 00:11:00
DO  - https://doi.org/10.1117/12.2199453
LA  - en
M1  - 9636
PB  - SPIE Proceedings: Scanning Microscopies 2015, Monterey, CA, US
PY  - 2015
TI  - Photomask Linewidth Comparison by PTB and NIST
ER  -