TY  - JOUR
AU  - Yi, Feng
AU  - Osborn, William
AU  - Betz, Jordan
AU  - LaVan, David
C2  - Journal of Microelectromechanical Systems
DA  - 2015-01-11 00:01:00
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2015
TI  - Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors
ER  -