TY  - JOUR
AU  - Tang, Ke
AU  - Kim, Hyun
AU  - Ramanayaka, Aruna
AU  - Simons, David
AU  - Pomeroy, Joshua
C2  - Journal of Physics Communications
DA  - 2020-03-09 00:03:00
DO  - https://doi.org/10.1088/2399-6528/ab7b33
LA  - en
M1  - 4
PB  - Journal of Physics Communications
PY  - 2020
TI  - Targeted enrichment of 28Si thin films for quantum computing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929209
ER  -