TY  - JOUR
AU  - Rim, Min-Ho
AU  - Agocs, Emil
AU  - Dixson, Ronald
AU  - Kavuri, Premsagar
AU  - Vladar, Andras
AU  - Attota, Ravikiran
C2  - Journal of Vacuum Science and Technology B
DA  - 2020-08-28 00:08:00
LA  - en
PB  - Journal of Vacuum Science and Technology B
PY  - 2020
TI  - Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928754
ER  -