TY  - CONF
AU  - ende, B Am
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Headley, T
AU  - Guthrie, William
AU  - Linholm, Loren
AU  - Bogardus, E.
AU  - Murabito, Christine
C2  - Proc., 2002 ICMTS, Cork, US
DA  - 2002-04-01 00:04:00
LA  - en
M1  - 15
PB  - Proc., 2002 ICMTS, Cork, US
PY  - 2002
TI  - Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
ER  -