TY  - JOUR
AU  - Cresswell, Michael
AU  - Guillaume, Nadine
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Ghoshtagore, Rathindra
AU  - II, James OwenI
AU  - Osborne, Z.
AU  - Sullivan, N.
AU  - Linholm, Loren
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1999-05-01 00:05:00
LA  - en
M1  - 12
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1999
TI  - Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries
ER  -