TY - JOUR AU - McMullin, D AU - Judge, D AU - Tarrio, Charles AU - Vest, Robert AU - Hanser, F C2 - Applied Optics DA - 2004-07-01 00:07:00 LA - en M1 - 43 PB - Applied Optics PY - 2004 TI - Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings ER -