TY  - JOUR
AU  - Frigo, S
AU  - Levine, Zachary
AU  - Zaluzec, N
C2  - Applied Physics Letters
DA  - 2002-09-01 00:09:00
LA  - en
M1  - 81
PB  - Applied Physics Letters
PY  - 2002
TI  - Submicron Imaging of Buried Integrated Circuit Structures Using Scanning Confocal Electron Microscopy
ER  -