TY - CONF AU - Huang, P. AU - Leibfried, Dietrich C2 - 3rd International Conference on Solid State Lighting, Undefined DA - 2003-10-01 00:10:00 LA - en M1 - 5524 PB - 3rd International Conference on Solid State Lighting, Undefined PY - 2003 TI - Achromatic Catadioptric Microscope Objective in Deep Ultraviolet with Long Working Distance ER -