TY  - JOUR
AU  - Misakian, M
AU  - Benck, Eric
AU  - Wang, Ying-Ju
C2  - Journal of Applied Physics
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 88
PB  - Journal of Applied Physics
PY  - 2000
TI  - Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas
ER  -