TY  - JOUR
AU  - Edamura, M
AU  - Benck, Eric
C2  - Journal of Vacuum Science and Technology A
DA  - 2003-01-01 00:01:00
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 2003
TI  - Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas
ER  -