TY  - CONF
AU  - Kenyon, Elizabeth
AU  - Cresswell, Michael
AU  - Patrick, Heather
AU  - Germer, Thomas
C2  - Proceedings of the SPIE, Volume 6922, San Jose, CA
DA  - 2008-09-01 00:09:00
LA  - en
M1  - 6922
PB  - Proceedings of the SPIE, Volume 6922, San Jose, CA
PY  - 2008
TI  - Modeling the Effect of Finite Size Gratings on Scatterometry Measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842444
ER  -