TY  - CONF
AU  - Kim, Jae
AU  - Ehrman, S
AU  - Mulholland, George
AU  - Germer, Thomas
C2  - Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Conference | 2nd | Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II | SPIE, Undefined
DA  - 2001-12-01 00:12:00
LA  - en
PB  - Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Conference | 2nd | Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II | SPIE, Undefined
PY  - 2001
TI  - Polarized Light Scattering From Metallic Particles on Silicon Wafers
ER  -