TY  - CONF
AU  - Gillen, John
AU  - Wight, Scott
AU  - Chi, P
AU  - Fahey, Albert
AU  - Verkouteren, Jennifer
AU  - Windsor, Eric
AU  - Fenner, D.
C2  - Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX
PY  - 2003
TI  - Bevel Depth Profiling SIMS for Analysis of Layer Structures
ER  -