TY - JOUR AU - Potma, E AU - Xie, X. AU - Muntean, L AU - Preusser, Jan AU - Jones, D AU - Ye, Jun AU - Leone, S AU - Hinsberg, E AU - Schade, W C2 - Journal of Physical Chemistry B DA - 2004-01-01 00:01:00 LA - en M1 - 108 PB - Journal of Physical Chemistry B PY - 2004 TI - Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy ER -