TY - JOUR AU - Kim, Yong AU - Dagalakis, Nicholas AU - Ferraris, Chiara AU - Avramov-Zamurovic1, Svetlana C2 - Electronics DA - 2015-12-31 00:12:00 LA - en M1 - 19 PB - Electronics PY - 2015 TI - Design of a 1 DOF MEMS motion stage for a parallel plane geometry rheometer UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919745 ER -