TY  - JOUR
AU  - Imtiaz, Atif
AU  - Chang, Yuan-Jen
AU  - Gray, Jason
AU  - Seghete, Dragon
AU  - George, Steven
AU  - Wallis, Thomas
AU  - Kabos, Pavel
AU  - Rogers, Charles
AU  - Bright, Victor
C2  - IEEE Journal of Microelectromechanical Systems
DA  - 2009-09-24 00:09:00
DO  - https://doi.org/10.1016/j.sna.2008.11.015
LA  - en
M1  - 154
PB  - IEEE Journal of Microelectromechanical Systems
PY  - 2009
TI  - Micromachined resonators of high Q-factor based on atomic layer deposited alumina
ER  -