TY  - JOUR
AU  - Jones, Ronald
AU  - Hu, T
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Kolb, R
AU  - Casa, D
AU  - Bolton, P
AU  - Barclay, G
C2  - Applied Physics Letters
DA  - 2003-11-01
LA  - en
M1  - 83
PB  - Applied Physics Letters
PY  - 2003
TI  - Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852166
ER  -