TY  - JOUR
AU  - Jablonski, E
AU  - Sambasivan, S
AU  - Fischer, Daniel
AU  - Lin, Eric
AU  - Devadoss, C
AU  - Puligadda, R
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-12-01
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Near Edge X-Ray Absorption Fine Structure Measurements of the Interface Between Bottom Anti-Reflective Coatings and a Model Deprotected Photoresist
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852222
ER  -