TY  - JOUR
AU  - Lee, Hae-Jeong
AU  - Soles, Christopher
AU  - Liu, Da-Wei
AU  - Bauer, Barry
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - Journal of Applied Physics
DA  - 2006-09-01
LA  - en
M1  - 100
PB  - Journal of Applied Physics
PY  - 2006
TI  - Structural Characteristics of Methylsilsesquioxane Based Porous Low-k Thin Films Fabricated with Increasing Cross-Linked Particle Porogen Loading
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852378
ER  -