TY  - JOUR
AU  - Lee, Hae-Jeong
AU  - Soles, Christopher
AU  - Liu, Da-Wei
AU  - Bauer, Barry
AU  - Wu, Wen-Li
C2  - Journal of Polymer Science Part B-Polymer Physics
DA  - 2002-10-01
LA  - en
M1  - 40
PB  - Journal of Polymer Science Part B-Polymer Physics
PY  - 2002
TI  - Pore Size Distributions in Low-K Dielectric Thin Films From X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852050
ER  -